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題名:多注頭製程製程能力指標之研究
作者:王嘉興
作者(外文):Dja-Shin Wang
校院名稱:國立雲林科技大學
系所名稱:管理研究所博士班
指導教授:古東源
周昭宇
學位類別:博士
出版日期:2007
主題關鍵詞:管制圖製程良率指標製程能力指標多注頭製程Multiple process streamsSimulationEstimation methodControl chartProcess yield indexProcess capability indexBootstrap confidence interval
原始連結:連回原系統網址new window
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摘要
工業製程中,多注頭製程(Multiple streams process)是近年及未來的發展新趨勢,尤其是IC半導體產業中,常用一模多穴及多注頭製程以提升產量、降低成本與提升競爭力。製程能力指標是重要的品質衡量指標;然而目前文獻上卻很少有多注頭製程能力指標之學術研究與理論探討。因為現今實務上對多注頭製程品質管理中,仍然無法精確衡量真實的製程能力,此問題常造成顧客對真正的製程品質能力有錯誤的認知。因此,本研究在於建立多注頭製程能力指標並且應用於實務上,期望能在學術理論之研究和實務應用上有所貢獻。
本研究首先建立常態分配製程的多注頭製程能力指標之信賴區間估計,並用半導體產業實例驗證。其次是要建立多注頭製程良率指標,並將創立一個新指標 來精確衡量多注頭製程良率指標,完成理論推導並且應用到實務上。最後進一步發展多注頭製程能力分析管制圖(MSPCA),應用此圖,可以將每個注頭良率指標顯示在同一張分析管制圖上;用MSPCA圖可同時監控管制每個注頭品質特性中,偵測每個注頭品質特性偏移目標中心值與變異程度。本研究用IC封装測試流程實例驗證,期望能同步偵測到製程異常的注頭,立即加以改善。同時完成理論建立及實務應用之研究,並且對IC產業追求更高品質有立即有效的貢獻。
Abstract
Process capability indices, such as Cpk, have been widely used in the manufacturing industry to provide common quantitative measures for process performance. The capability index Cpk for multiple process streams is an indicator, introduced by Bothe (1999), for evaluating the capability of a multiple streams process. Bootstrapping is a nonparametric, but computer intensive, estimation method. In this study we used bootstrap method to develop a simulation study on the behavior of four 95% bootstrap confidence intervals i.e., standard bootstrap (SB), percentile bootstrap (PB), biased-corrected percentile bootstrap (BCPB), and biased-corrected and accelerated bootstrap (BCa) for estimating the capability index Cpk of a multiple streams process. It is found that results of a simulation study on the behavior of four 95% bootstrap confidence intervals i.e., SB, PB, BCPB and BCa for estimating the multiple process streams capability index Cpk.
Three indicators were calculated from each complete simulation run: the coverage percentage, the average length and the standard deviation of the length of each bootstrap confidence interval. This study make a contribution to drawing the analysis results of four main effect factors and three indicators on evaluating the capability of a multiple streams process.
The index Cpk only provides an approximate rather than an exact measure of the process yield. To obtain an exact measure of the process yield, Boyles (1994) proposed a yield index Spk. In the study, a new index that is able to provide an exact measure of yield for a multiple streams process is developed. Three examples are given for illustration. From the results of the yield measure in the three examples, the conventional approach, using the arithmetic average of the estimated yield indices of all streams, will certainly over-estimate the process yield.
Process capability plots with single stream process have earlier been discussed by Deleryd and Vännman (1999). In this study, we introduce a new control chart, called the multiple streams process capability analysis (MSPCA) chart, using the multiple streams yield index . The MSPCA chart displays all the stream capability index values on one chart, and indicates the stream yield based on the Spk contours. Using the chart, engineers can effectively monitor and control the performance of all streams process simultaneously. In addition, the MSPCA chart also provides a clear direction on the streams that should be targeted for quality/reliability improvement. We demonstrate the use of MSPCA chart by presenting a case study of an IC assembly process.
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