半導體設備零件因成本高、使用率差異性大、上游採購前置時間不穩定與下游需求率不確定等因素，使得零件之存貨管理問題一直困擾著業者。本文針對使用次數多、價格昂貴之半導體設備零件，並以其供應商之觀點建構出一簡單之快速流動零件的存貨模型。而且依所屬機臺之重要性，將相同零件分為關鍵性與非關鍵性零件，並採用特殊（Q, r）存貨政策，且再訂購點以下之存貨量，只供給屬關鍵性零件之需求。以總成本最小為目標，在服務水準限制下，求出最適訂購量與再訂購點。最後，以某半導體設備與服務供應商為例，在服務水準考量下，求最適訂購量及再訂購點。

Spare parts of semiconductor equipment are high cost, high difference of usage, unstable lead time supplying and demand uncertainty etc. leading to various barriers of inventory control. This paper aims to propose a simple fast-moving spare parts inventory control model for high frequent usage and expensive spare parts. The model is established in the supplier perspective. According to the importance of the semiconductor equipment, common spare parts can be divided into critical and non-critical spare parts. A specific (Q, r) inventory policy is adopted but only supply critical spare parts below the reorder point. Under the goal of the minimum total cost and limitation service level, the optimal order quantity and reorder point. Finally, a case study of fast-moving spare parts of semiconductor equipment will be investigated to determine the optimal order quantity and reorder point under service level consideration.