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題名：Manufacturing Intelligence for Early Warning of Key Equipment Excursion for Advanced Equipment Control in Semiconductor Manufacturing
書刊名：工業工程學刊
作者：許嘉裕／簡禎富／陳培穠
作者(外文)：Hsu, Chia-yu／Chien, Chen-fu／Chen, Pei-nong
出版日期：2012
卷期：29:5
頁次：頁303-313
主題關鍵詞：製造智慧；先進設備控制；預警；資料挖礦；決策樹；良率提升；半導體製造；海量資料；Manufacturing intelligence；Advanced equipment control；Early warning；Data mining；Decision tree；Yield enhancement；Semiconductor manufacturing；Big data
原始連結：連回原系統網址new window
相關次數：
  • 被引用次數被引用次數:期刊(2) 博士論文(0) 專書(0) 專書論文(0)
  • 排除自我引用排除自我引用:2
  • 共同引用共同引用:0
  • 點閱點閱:31
As feature sizes of integrated circuits are continuously shrinking in nanotechnologies, mining potentially useful information to extract manufacturing intelligence from big data automatically collected in the wafer fabrication facilities to assist in real time decisions for yield enhancement has become practically crucial to maintain competitive advantages and support intelligent manufacturing for operational excellence. Motivated by real needs, this study aims to develop an effective approach to extract manufacturing intelligence for early detection of key equipment excursion for advanced equipment control to enhance yield and reduce potential loss. For validation, an empirical study was conducted in a leading semiconductor manufacturing company to validate the proposed approach in the developed ‘‘early warning system’’ of newly released equipment to reduce tool excursion and abnormal yield loss. The results have demonstrated practical viability of the proposed approach. Indeed, the developed solution has been implemented in this company.
期刊論文
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2.Wang, K.-J.、Lin, Y.-S.、Chien, C.-F.、Chen, J. C.(2009)。A fuzzy-knowledge resource-allocation model of the semiconductor final test industry。Robotics and Computer Integrated Manufacturing，25(1)，32-41。  new window
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7.Chien, C.-F.、P. Lee、C. Peng(2003)。Semiconductor manufacturing data mining for clustering and feature extraction。Journal of Information Management，10(1)，63-84。  new window
8.Chien, C.-F.、D. Lin、Q. Liu、C. Peng、C. Hsu、C. Huang(2002)。Developing a data mining method for wafer binmap clustering and an empirical study in a semiconductor manufacturing fab。Journal of the Chinese Institute of Industrial Engineers，19(2)，23-38。  new window
9.Chen, A.、J. Blue(2009)。Recipe-independent indicator for tool health diagnosis and predictive maintenance。IEEE Transactions on Semiconductor Manufacturing，22(4)，522-535。  new window
10.Chen, L.、Chien, C.-F.(2011)。Manufacturing intelligence for class prediction and rule generation to support human capital decisions for high-tech industries。Flexible Services and Manufacturing Journal，23(3)，263-289。  new window
11.Chien, C.-F.、Chen, H.-K.、Wu, J.-Z.、Hu, C.-H.(2007)。Construct the OGE for promoting tool group productivity in semiconductor manufacturing。International Journal of Production Research，45(3)，509-524。  new window
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14.Chien, C.-F.、Wang, H.-J.、Wang, M.(2007)。A UNISON Framework for Analyzing Alternative Strategies of IC Final Testing for Enhancing Overall Operational Effectiveness。International Journal of Production Economics，107(1)，20-30。  new window
15.Chien, C. F.、Hsiao, A.、Wang, I.(2004)。Constructing semiconductor manufacturing performance indexes and applying data mining for manufacturing data analysis。Journal of the Chinese Institute of Industrial Engineers，21(4)，313-327。  new window
16.Braha, D.、Shmilovici, A.(2002)。Data mining for improving a cleaning process in the semiconductor industry。IEEE Transactions on Semiconductor Manufacturing，15(1)，91-101。  new window
17.Chien, C.-F.、Wang, W. C.、Cheng, J. C.(2007)。Data mining for yield enhancement in semiconductor manufacturing and an empirical study。Expert Systems with Applications，33(1)，192-198。  new window
18.Hsu, Shao-Chung、Chien, Chen-Fu(2007)。Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing。International Journal of Production Economics，107(1)，88-103。  new window
19.Peng, J.-T.、Chien, C. F.、Tseng, T. L. B.(2004)。Rough Set Theory for Data Mining for Fault Diagnosis on Distribution Feeder。IEE Proceedings - Generation, Transmission, and Distributions，151(6)，689-697。  new window
20.Kotsiantis, S. B.(2007)。Supervised machine learning: a review of classification techniques。Informatics，31(1)，249-268。  new window
21.Mak, B.、Munakata, T.(2002)。Rule Extraction from Expert Heuristics: A Comparative Study of Rough Sets with Neural Networks and ID3。European Journal of Operational Research，136(1)，212-229。  new window
22.Chien, C.-F.、Chen, Y.-J.、Peng, J.-T.(2010)。Manufacturing intelligence for semiconductor demand forecast based on technology diffusion and product life cycle。International Journal of Production Economics，128(2)，496-509。  new window
23.Hsu, C.-Y.、Chien, C.-F.、Lin, K.-Y.、Chien, C.-Y.(2010)。Data Mining for Yield Enhancement in TFT-LCD Manufacturing and an Empirical Study。Journal of the Chinese Institute of Industrial Engineers，27(2)，140-156。  new window
24.Wu, Jei-Zheng、Chien, Chen-Fu(2008)。Modeling Strategic Semiconductor Assembly Outsourcing Decisions Based on Empirical Settings。OR Spectrum，30(3)，401-430。  new window
25.Wu, J.-Z.、Chien, C.-F.、Gen, M.(2012)。Coordinating strategic outsourcing decisions for semiconductor assembly using a bi-objective genetic algorithm。International Journal of Production Research，50(1)，235-260。  new window
26.Braha, D.、Shmilovici, A.(2003)。On the use of decision tree induction for discovery of interactions in a photolithographic process。IEEE Transactions on Semiconductor Manufacturing，16(4)，644-652。  new window
27.Chien, C.-F.、Chen, L. F.(2007)。Using rough set theory to recruit and retain high-potential talents for semiconductor manufacturing。IEEE Transactions on Semiconductor Manufacturing，20(4)，528-541。  new window
28.Chien, C.-F.、Hsu, C. Y.(2006)。A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing。Journal of Intelligent Manufacturing，17(4)，429-439。  new window
29.Kuo, C.-J.、Chien, C.-F.、Chen, C.-D.(2011)。Manufacturing intelligence to exploit the value of production and tool data to reduce cycle time。IEEE Transactions on Automation Science and Engineering，8(1)，103-111。  new window
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圖書
1.Tanis, E. A.、Hogg, R. V.(2001)。Probability and Statistical Inference。New Jersey：Prentice Hall International, Inc.。  new window
2.Han, Jiawei、Kamber, Micheline(2006)。Data Mining: Concepts and Techniques。San Francisco：Morgan Kaufmann Publishers。  new window
3.Berry, Michael J. A.、Linoff, Gordon S.(2004)。Data Mining Techniques for Marketing, Sales and Customer Relationship Management。Wiley Publishers。  new window
 
 
 
 
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