This study proposes a two-stage research structure. In the first stage, the standards of ISO/CNS 14064-1 and the Greenhouse Gas (GHG) protocol are used to investigate the guiding principles and required procedures of GHG inventory for a wafer probing factory (WPF). Based on these standards, the GHG inventory results of the WPF are gained and classified according to scopes. In the second stage, the GHG inventory results of the WPF are internally verified based on the standards of ISO/CNS 14064-3. The flaws of GHG inventory identified in the process of verification can be used as the reference of GHG inventory in the future. Finally, a real WPF is used to expound the research structure and the year of GHG inventory is 2012. Based on the results of the first stage of this study, the total GHG emission of the case company is 19859.96 tons CO2e/year in 2012. Comparing the emissions of major GHG emitters, the emission of “purchased electricity” is 19845.30 tons CO2e/year and the percentage is 99.93%. In the second stage of this study, a group from members of environment and security department of the case company is formed to internally verify the GHG inventory results. The key points of verification include organizational boundary, operational boundary, quantitative method, base year emissions, and data quality management. Verification results show that all the key points are met the standards of ISO/CNS 14064-1.