本研究將針對半導體氣體管路工程承攬商遴選進行研究探討，應用群體決策及多屬性分析方法。透過修正式德爾菲法得到工程品質控管、工程專案管理、工程專案成本與工程專案能力等四個構面二十一個評估因子。採用層級分析法研究之結果，得到工程專案成本為氣體管路承攬商遴選最重要的關鍵構面，其次依序為工程專案管理、工程品質控管、工程專案能力。評估因子中最重要的為工程專案變更應變能力，其次為工程專案的了解度、工程專案材料備援規劃；最不重要的評估因子分別為氣體管路設備、氣體管路材料、公司營運狀況及長期穩定性。根據上述研究結果，提出決策之權重數據與未來研究之建議，供相關單位做決策之方法與後續研究者作為參考。

This research will focus on the selection of semiconductor gas pipeline engineering contractors and apply group decision-making and multi-attribute analysis methods. Through the modified Delphi method, there are 21 evaluation factors for 4 aspects of engineering quality control, engineering project management, engineering project cost and engineering project capability. With the results of hierarchical analysis, the engineering project cost was selected as the most important key factor for gas pipeline contractors, followed by engineering project management, engineering quality control, and engineering project capabilities. The most important factor in the evaluation is, the ability on the response of change in the engineering project, followed by the understanding of the project, the backup planning of the project materials; the most insignificant assessment factors are gas pipeline equipment, gas pipeline materials, the company's operating conditions and long-term stability. Based on the above research results, provide the weighting data of decision-making and suggestions for future research, and the relevant units to make decisions and reference for following researchers.