| 期刊論文| 1. | Ingolfsson, A.、Sachs, E.(1993)。Stability and sensitivity of an EWMA controller。Journal of Quality Technology，25，271-287。   | | 2. | Sachs, E.、Hu, A.、Ingolfsson A.(1995)。Run by Run Process Control: Combining SPC and Feedback Control。IEEE Transactions on Semiconductor Manufacturing，8，26-43。 | | 3. | Butler, S. W.、Stefani, J. A.(1994)。Supervisory run-to-run control of a polysilicon gate etch using in situ ellipsometry。IEEE Transactions on Semiconductor Manufacturing，7(2)，193-201。 | | 4. | Clarke, D. W.、Gawthrop, P. J.(1975)。Self tuning controller。IEE Proceedings: D, Control Theory and Applications，122(9)，929-935。 | | 5. | Del Castillo, E.(1996)。A multivariate self-tuning controller for run-to-run process control under shift and trend disturbances。IIE Transactions，28(12)，1011-1021。 | | 6. | Del Castillo, E.、Hurwitz, A. M.(1997)。Run to run process control: Literature review and extensions。Journal of Quality Technology，29(2)，184-196。 | | 7. | Del Castillo, E.、葉進儀(1998)。An adaptive run-to-run optimizing controller for linear and nonlinear semiconductor processes。IEEE Transactions on Semiconductor Manufacturing，11(2)，285-295。 | | 8. | Hankinson, M.、Vincent, T.、Irani, K. B.、Khargonekar, P. P.(1997)。Integrated real-time and run-to-run control of etch depth in reactive ion etching。IEEE Transactions on Semiconductor Manufacturing，10(1)，121-130。 | 會議論文| 1. | 江行全、范書愷、任志宏、王建智(2001)。多變量自適應控制應用於半導體R2R製程。沒有紀錄。 延伸查詢 | | 2. | Boning, D.、Moyne, W.、Smith, T.、Moyne, J.、Hurwitz, A.(1995)。Practical issues in run by run process control。沒有紀錄。201-208。 | | 3. | Edgar, T. F.、Campbell, W. J.、Bode, C.(1999)。Model-based control in microelectronics manufacturing。沒有紀錄。4185-4191。 | | 4. | 郭瑞祥、陳正剛、Chen, Jin-Jung(2000)。Run-to-run control schemes for CMP process subject to deterministic drifts。沒有紀錄。251-258。 | | 5. | Hu, Albert、He, Du、Wong, Steve、Renteln, P.、Sachs, E.(1994)。Application of run by run controller to the chemical-mechanical planarization process II。沒有紀錄。371-378。 | | 6. | Hu, Albert、Sachs, E.、Ingolfsson, A.、Langer, P.(1992)。Run-by-run process control: Performance benchmarks。沒有紀錄。73-78。 | 學位論文| 1. | Adewuya, A.(1996)。New Methods in Genetic Search with Real-valued Chromosomes，Cambridge, MA。 | 圖書| 1. | Goldberg, D. E.(1989)。Gene Algorithm in Search, Optimization and Machine Learning。New York：Massachusetts：Addison-Wesley。 | | 2. | Haupt, R. L.、Haupt, S. E(1998)。Practical genetic algorithms。New York：John Wiley & Sons Inc.。 | | 3. | Man, Kim-Fung、Tang, Wallace Kit Sang、鄺得互(1999)。Genetic Algorithms: Concepts and Designs。Genetic Algorithms: Concepts and Designs。London, UK。 | | 4. | Moyne, J.、Del Castillo, E.、Hurwitz, A. M.(2001)。Run-to-run control in semiconductor manufacturing。Run-to-run control in semiconductor manufacturing。Florida, USA。 | |