Many enterprises have adopted sophisticated information systems for supporting their business process and following with great influence on internal audit departments. This situation increases the need for adopting CAATTs to review and monitor internal control systems more effectively. However, it is difficult to utilize CAATTs without an appropriate modeling tool for analyzing computer-aided audit procedures. The research objectives of this study are: To identify and extend the current business process modeling notations based on risk assessments and auditing perspectives, and to apply them as the modeling methods for control processes and audit activities. We adopt three UML diagrams for analyzing auditing procedures. The sequence diagram, which focuses on time order, is suitable for describing business control processes. Especially, we emphasize the usage of notation to indicate the control points. The audit class diagram is used to describe the relationships of fields and tables for each audit issue. In addition, by using the activity diagram, which identifies main auditing steps, the logic and analysis of audit procedures would be more concise for reading and easily understanding. In addition, questionnaire survey is adopted to confirm the ease to understand, ease to use, and benefits of applying our modeling tools for auditors, IS staffs and IT auditors. The result indicates that these modeling tools have positive impacts on the design and maintenance activities of computer-aided audit programs.