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引文資料
題名:
Wafer Fault Detection and Key Step Identification for Semiconductor Manufacturing Using Principal Component Analysis, AdaBoost and Decision Tree
書刊名:
工業工程學刊
作者:
Fan, Shu-kai S.
/
Lin, Shou-chih
/
Tsai, Pei-fang
出版日期:
2016
卷期:
33:3
頁次:
頁151-168
主題關鍵詞:
Fault detection
;
FD
;
AdaBoost
;
Semiconductor manufacturing
;
Key step identification
原始連結:
連回原系統網址
相關次數:
被引用次數:期刊(0) 博士論文(0) 專書(0) 專書論文(0)
排除自我引用:0
共同引用:0
點閱:11
期刊論文
1.
Chapelle, O.、Vapnik, V.、Bousquet, O.、Mukherjee, S.(2002)。Choosing multiple parameters for support vector machines。Machine Learning,46(1),131-159。
2.
Oh, I.-S.、Lee, J. -S.、Moon, B.-R.(2004)。Hybrid Genetic Algorithms for Feature Selection。IEEE Trans. Pattern Analysis and Machine Intelligence,26(11),1424-1437。
3.
Freund, Yoav、Schapire, Robert E.(1997)。A Decision-theoretic Generalization of On-line Learning and an Application to Boosting。Journal of Computer and System Sciences,55(1),119-139。
4.
Chien, C. F.、Hsu, C. Y.、Chen, P. N.(2013)。Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence。Flexible Services and Manufacturing Journal,25(3),367-388。
5.
Belkin, Nicholas J.、Croft, W. B.(1992)。Information Filtering and Information Retrieval: Two Sides of the Same Coin?。Communications of the ACM,35(12),29-38。
6.
Jain, A. K.、Duin, R. P. W.、Mao, J.(2000)。Statistical pattern recognition: A review。IEEE Transactions on Pattern Analysis and Machine Intelligence,22,4-37。
7.
Pearson, K.(1901)。On lines and planes of closest fit to systems of points in space。Philosophical Magazine Series 6,2(11),559-572。
8.
Burges, C. J. C.(1998)。A Tutorial on Support Vector Machines for Pattern Recognition。Data Mining and Knowledge Discovery,2(2),121-167。
9.
Canbas, S.、Cabuk, A.、Kilic, S. B.(2005)。Prediction of commercial bank failure via multivariate statistical analysis of financial structure: The Turkish case。European Journal of Operational Research,166(2),528-546。
10.
Friedman, J. H.、Hastie, T.、Tibishirani, R.(2000)。Additive logistic regression: a statistical view of boosting。Annals of Statistics,28(2),337-407。
11.
Hotelling, H.(1933)。Analysis of a Complex of Statistical Variables into Principal Components。Journal of Educational Psychology,24(6),417-441。
12.
Min, S. H.、Lee, J.、Han, I.(2006)。Hybrid Genetic Algorithms and Support Vector Machines for Bankruptcy Prediction。Expert Systems with Applications,31(3),652-660。
13.
Yang, J.、Honavar, V.(1998)。Feature subset selection using a genetic algorithm。IEEE Intelligent Systems,13(2),44-49。
14.
Cortes, Corinna、Vapnik, Vladimir N.(1995)。Support-Vector Networks。Machine Learning,20(3),273-297。
會議論文
1.
De la Torre, F.、Black, M. J.(2001)。Robust principal component analysis for computer vision362-369。
2.
Koller, D.、Sahami, M.(1996)。Toward optimal feature selection284-292。
3.
Pechenizkiy M.、Puuronen, S.、Tsymbal, A.(2006)。The impact of sample reduction on PCA-based feature extraction for supervised learning553-558。
4.
Susto, G. A.、Pampuri, S.、Schirru, A.、De Nicolao, G.、McLoone, S.、Beghi, A.(2012)。Automatic control and machine learning for semiconductor manufacturing: Review and challenges。10th European Workshop on Advanced Control and Diagnosis,(會議日期: Nov. 8-9, 2012)。Kgs, Lyngby:Technical University of Denmark。
圖書
1.
Han, Jiawei、Kamber, Micheline(2001)。Data mining: concepts and techniques。Oxford, CA:Morgan Kaufmann Publisher, Inc.。
2.
Hastie, Trevor、Tibshirani, Robert、Friedman, Jerome H.、Franklin, James(2001)。The Elements of Statistical Learning: Data Mining, Inference and Prediction。Springer。
3.
Liu, H.、Motoda, H.(1998)。Feature selection for knowledge discovery and data mining。Kluwer Academic Publishers。
4.
Yang, K.、Trewn, J.(2004)。Multivariate Statistical Methods in Quality Management。New York, NY:McGraw-Hill。
其他
1.
Jolliffe, I.(2014)。Principal Component Analysis。
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