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題名：Wafer Fault Detection and Key Step Identification for Semiconductor Manufacturing Using Principal Component Analysis, AdaBoost and Decision Tree
書刊名：工業工程學刊
作者：Fan, Shu-kai S.／Lin, Shou-chih／Tsai, Pei-fang
出版日期：2016
卷期：33:3
頁次：頁151-168
主題關鍵詞：Fault detection；FD；AdaBoost；Semiconductor manufacturing；Key step identification
原始連結：連回原系統網址new window
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  • 點閱點閱:12
期刊論文
1.Chapelle, O.、Vapnik, V.、Bousquet, O.、Mukherjee, S.(2002)。Choosing multiple parameters for support vector machines。Machine Learning，46(1)，131-159。  new window
2.Oh, I.-S.、Lee, J. -S.、Moon, B.-R.(2004)。Hybrid Genetic Algorithms for Feature Selection。IEEE Trans. Pattern Analysis and Machine Intelligence，26(11)，1424-1437。  new window
3.Freund, Yoav、Schapire, Robert E.(1997)。A Decision-theoretic Generalization of On-line Learning and an Application to Boosting。Journal of Computer and System Sciences，55(1)，119-139。  new window
4.Chien, C. F.、Hsu, C. Y.、Chen, P. N.(2013)。Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence。Flexible Services and Manufacturing Journal，25(3)，367-388。  new window
5.Belkin, Nicholas J.、Croft, W. B.(1992)。Information Filtering and Information Retrieval: Two Sides of the Same Coin?。Communications of the ACM，35(12)，29-38。  new window
6.Jain, A. K.、Duin, R. P. W.、Mao, J.(2000)。Statistical pattern recognition: A review。IEEE Transactions on Pattern Analysis and Machine Intelligence，22，4-37。  new window
7.Pearson, K.(1901)。On lines and planes of closest fit to systems of points in space。Philosophical Magazine Series 6，2(11)，559-572。  new window
8.Burges, C. J. C.(1998)。A Tutorial on Support Vector Machines for Pattern Recognition。Data Mining and Knowledge Discovery，2(2)，121-167。  new window
9.Canbas, S.、Cabuk, A.、Kilic, S. B.(2005)。Prediction of commercial bank failure via multivariate statistical analysis of financial structure: The Turkish case。European Journal of Operational Research，166(2)，528-546。  new window
10.Friedman, J. H.、Hastie, T.、Tibishirani, R.(2000)。Additive logistic regression: a statistical view of boosting。Annals of Statistics，28(2)，337-407。  new window
11.Hotelling, H.(1933)。Analysis of a Complex of Statistical Variables into Principal Components。Journal of Educational Psychology，24(6)，417-441。  new window
12.Min, S. H.、Lee, J.、Han, I.(2006)。Hybrid Genetic Algorithms and Support Vector Machines for Bankruptcy Prediction。Expert Systems with Applications，31(3)，652-660。  new window
13.Yang, J.、Honavar, V.(1998)。Feature subset selection using a genetic algorithm。IEEE Intelligent Systems，13(2)，44-49。  new window
14.Cortes, Corinna、Vapnik, Vladimir N.(1995)。Support-Vector Networks。Machine Learning，20(3)，273-297。  new window
會議論文
1.De la Torre, F.、Black, M. J.(2001)。Robust principal component analysis for computer vision362-369。  new window
2.Koller, D.、Sahami, M.(1996)。Toward optimal feature selection284-292。  new window
3.Pechenizkiy M.、Puuronen, S.、Tsymbal, A.(2006)。The impact of sample reduction on PCA-based feature extraction for supervised learning553-558。  new window
4.Susto, G. A.、Pampuri, S.、Schirru, A.、De Nicolao, G.、McLoone, S.、Beghi, A.(2012)。Automatic control and machine learning for semiconductor manufacturing: Review and challenges。10th European Workshop on Advanced Control and Diagnosis，(會議日期: Nov. 8-9, 2012)。Kgs, Lyngby：Technical University of Denmark。  new window
圖書
1.Han, Jiawei、Kamber, Micheline(2001)。Data mining: concepts and techniques。Oxford, CA：Morgan Kaufmann Publisher, Inc.。  new window
2.Hastie, Trevor、Tibshirani, Robert、Friedman, Jerome H.、Franklin, James(2001)。The Elements of Statistical Learning: Data Mining, Inference and Prediction。Springer。  new window
3.Liu, H.、Motoda, H.(1998)。Feature selection for knowledge discovery and data mining。Kluwer Academic Publishers。  new window
4.Yang, K.、Trewn, J.(2004)。Multivariate Statistical Methods in Quality Management。New York, NY：McGraw-Hill。  new window
其他
1.Jolliffe, I.(2014)。Principal Component Analysis。  new window
 
 
 
 
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