The advanced weapon systems and devices have been deployed in Taiwan’s armed forces for many years. Some of the systems and devices have stepped into their maintenance periods that require a huge cost and labors for maintenance. In addition, one of the Ministry of National Defense’s policies is to downsize organization. However, it will seriously affect the quality and usefulness of the systems and devices. The purpose of this study is to explore the feasibility of applying performance-based contracts on the maintenance of weapon systems through a questionnaire. This study concludes that performance-based contracts is suitable for weapon systems maintenance in Taiwan. When performance-based contracts are used, the mechanisms of incentive (achieving desired performance level, satisfying temporary requirement, completing works ahead of schedule, improving weapon systems and devices performance, and improving custom’s satisfaction) and penalty can be considered to improve the performance of procuring maintenance service of weapon systems and devices.