隨著知識經濟的發展與高科技產業規模日益擴大，半導體晶圓廠知識工作者的人力資源管理與人力資本提昇越來越重要。在面臨人力成本逐年升高及自動化程度提昇之經營環境下，如何規劃最適人力與提昇知識工作者的生產力成爲重要課題。然而，半導體晶圓廠的人力規劃決策影響因子眾多，如何在兼顧策略性經營目標與作業面實際人力需求和人力合理分配以規劃工廠最適人力實爲一大難題。本研究回顧相關文獻，依據紫式決策分析架構發展晶圓廠之人力規劃決策模型，同時利用深度訪談法以萃取領域專家的知識，建立相關績效評估指標爲管理依據，輔以戴明循環爲基礎的管理機制，整合成一套兼具提昇半導體晶圓代工廠人力管理合理性、員工生產力及公司競爭力的人力規劃決策模型與管理機制，以利工廠營運效率及員工生產力的提昇。本研究並以某半導體公司爲實證，在不影響研究效度及分析下，本文中的資料及指標已做必要之修正，研究結果已證明本研究之效度。

With the scale of semiconductor manufacturing increases, the amounts the knowledge-workers also raise hugely. Besides, we are facing the situation that the cost of automation and manpower is ascending year by year, and the engineers and technical operators play more and more important roles in the factory. The best headcount plan of manufacturing and the improvement of productivity have become an essential topic. However, many factors would affect the headcount plan of manufacturing in a semiconductor manufacturing. It is a difficult problem to reflect the real demand of manpower given different preference structures of various decision makers. This research aims to employ UNISON decision analysis framework and construct an operation headcount planning model for semiconductor manufacturing. We also discussed with domain experts to build up key performance index for human capital management. An empirical study was conducted in a semiconductor company for validation. The results showed that the proposed framework can assist the company to develop an operation workforce planning model and associated management mechanism to improve the decision quality and rationality. Thus, the company can enhance people productivity and human capital to maintain corporate competitiveness.