The purpose of the study is to structure performance criteria for early intervention service institutes with a benchmarking approach. The subjects of the study are the professional team workers of 5th disability institutes prize early intervention institutes, including 14 institutes and 34 workers. The main conclusions of the study include: The service evaluation content include four levels (service plan, service offer, service management, service efficacy), twelve dimensions (service objective and leader's views, carry out the service and plan of the propaganda, design the service plan, team build and the way of cooperation, target integrated and elasticity revise, offer relative resources and family services, management of human resources, management and estimation of service record, transit and transfer resources, family's satisfaction, children's efficacy, and the use of the evaluation results) and fifty criteria. The study also makes recommendations for future researchers of the early intervention service evaluation practices and relevant topics.