This study first divides urbanization process into processes of residential land development and build-up. Then, we formulated the simultaneous differential equations and the car following theory which explain the urbanization motion track and these two kinds of process. The case study using the regression analysis to construct and verify the modal analyzes the regular pattern of urbanization and differences of development among twelve urban land readjustment areas in Tainan. Finally, important parameters decided by the regression analysis explain factors of influencing build-up development after urban land readjustment.